Orca-psg - Phosphosilicate Glass Removal System

We are engaged in offering excellent quality Orca-PSG - Phosphosilicate Glass Removal System to our valuable clients. Etch Batch Process For 1500 WPH Multi-Crystal Silicon Wafer Solar Process Line Process Steps: a c Thin glass etch a c DI rinse a c Drying (heated DI slow pull and air knife) Key Features a c High throughput with multiple robots, 1500 to 3000 wafers per hour a c Automated staging with 6 cassette input and output a c Low cost of ownership; extended bath life, reuse of rinsing water a c Input and output scales for wafer thickness metrics plus supporting software a c Minimal wafer breakage (>1 in 500) a c Minimal downtime for bath replacement, (<1 hour bath change) a c Monitoring bath metrics such as pH and temperature, plus concentration as an option a c Process support provided, optimized texturing and PSG removal process a c Safety is designed and built in; HF monitors, fire suppression, and SEMI safety compliant a c Software is SECS /GEM compliant a c System is SEMI S2 compliant Process Control a c Access control a c Multiple levels of functional security. a c Data logging a c Detail data is logged in individual daily logs for operator tool interactions, all events, alarms, and warnings. a c Lot tracking log files a c Custom trace files. a c Recipe control a c Recipe maintenance a c SECS-II GEM-compliant host interface. a c Integrates in-factory network without the need for special software or hardware. a c Communication has been an essential part of the product line since inception.