Titanium Alumina Targets For Vacuum Coating Machine

To be connected with the tremendous business sector requests, we are presenting a substantial extent of Titanium Alumina Targets For Vacuum Coating Machine.

Product name
high quality titanium targets for coating
ModelGr1,Gr2
Manufacturing technologyForged
ShapeRound or square.
Size(mm)Plate Target: Length:200-400mm Width:100-20 Thickness:15-30mm
Dimension: Dia:50-900mm*40-100mm
Delivery
Wooden case or according to customers requirements

The main performance target requirements:

Purity:
Purity is one of the key performance indicators in the target, because a great impact on the purity of the target thin film properties. However, in practice, on target purity requirements are not the same. For example, with the rapid development of the microelectronics industry, wafer sizes from 6 ", 8" development to 12 ", and the wiring width is reduced from 0.5um to 0.25um, 0.18um or 0.13um, previously a target purity of 99.995% 0.35umIC meet process requirements, and the preparation of the lines on the target 0.18um require 99.999% purity or 99.9999%.

Impurities
Target solid impurities and pores of oxygen and water vapor is the main source of the deposited film. Targets for different purposes for different impurity content requirements are also different. For example, aluminum and aluminum alloy target material used in the semiconductor industry, alkali metal content and the content of radioactive elements have special requirements.