Ir Film Coating Machine

To cater the variegated demands of our precious clients, our organization known as a leading Exporter, Distributor, Supplier and Trading Company of IR Film Coating Machine in Chengdu, Sichuan, China.
1.Vacuum chamber sizeI 1120A 1300MM,which is made of high grade 304 stainless steel ,inner surface by polishing treatment, surface with cooling water jacket,postposition pumping system,vertical front opening door structure.

2.Substrate holder speed 3i 30rpm, AC variable frequency speed regulation(Korea LG),up driven way.Workpiece plate axial and radial runouta A 2mm;ferrofluidic seal,whole substrate holder structure adopts 304 stainless steel.

3.Vacuum pumping system

4.Evaporation source:Electron gun 2pcs 270 degree,E-beam,
1set resistance evaporation,single power supply 5KW,evaporation current can work stable in500A.

5.Film thickness control instrument:American Inficon SQC-310 Quartz crystal single probe control system,which can used for coating multilayer film.

6.Vacuum chamber heated by electric heating tube,which can realize automatic control temperature.

7.Equipment base use merchant steel made,surface spray paint, open the door, beautiful decoration.

8.Inflation system:Equip 2 path"Japan Yamatake"mass flowmeter,Flow control range:8i 200SCCM;

9.Cryogenic system.

10.One set hall ion source.