Ar Coating Machine Application: Industrial

With the help of diligent and adept professionals, our organization is prominent Exporter, Distributor, Supplier and Trading Company of AR Coating Machine in Chengdu, Sichuan, China.
Brief introduction:
Baking temperature:Max 350 a ,temperature uniformity:300a A 5a (40 min)
Vacuum chamber:vacuum chamber size I 1120A 1300MM,304 stainless steel,2 sets Anti-fouling plate.
Controller cabinet: high-tension transformer, filament transformer,electric reactor all adopt resin potting.Equipment can realize automatic NO / OFF machine.
Workpiece frame system:Magnetic liquid sealing device,water jacket all is stainless steel,revolving speed 3i 30rpm, AC variable frequency speed regulating, up driven way.
Vacuum degree:Ultimate vacuum 3.0A 10 -4 Pa,vacuum holding requirements:after chamber reach ultimate vacuum,close high vacuum valve 12 hours,chamber vacuum degree a 20Pa,and close high vacuum valve 1hours,chamber vacuum degree a 6 x 10-1 Pa,restore vacuum time<15 min back to 3X10 -3 Pa.
Pumping system:diffusion pump + mechanical pump+roots pump
Repeatability and uniformity: whole cover film thickness distribution uniformity, each position spectral curve error A 2nm,each cover with good repeatability,the same place repeat 5 times film thickness error of A 3 nm (not less than 7 layers).
E-beam gun: 1pcs,10kw
Resistance evaporation: 1set ,5kw crystal control automatic control can be realized.