As-premium Rapid Thermal Processing System
Product Overview
Key Features
The high reliability guarantees low cost of ownership and allows small scale production up to 10,000 wafers per year.
Both pyrometer and thermocouple temperature measurements are standard features. The fast digital PID temperature controller provides high temperature reproducibility (A 1A C). The system assures accurate and repeatable thermal control across the temperature range.
The design of the process chamber allows connection to a cluster tool or a glove box (option).
The RTP system can receive a turbo molecular pumping unit in order to provide ultra clean process environment.
Silicon carbide coated graphite susceptors are available for processing of compound semiconductor and small samples. The design of susceptor and process chamber allows enhanced temperature control and process uniformity.
Company Details
Business Type
Manufacturer, Supplier
Establishment
2004
Working Days
Monday To Sunday
Seller Details
ANNEALSYS
Sales Manager
Mr Henri De Los Rios
Address
BAT T2, PIT de la Pompignane, Rue de la Vieille Poste, Montpellier, Herault, 34055, France
Scientific Instruments in MontpellierReport incorrect details
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