Annealsys Mc050 System
Product Overview
Key Features
The infrared lamp furnace and the system design provide multi process capability inside the same process chamber: CVD, ALD, RTP and RTCVD.
The process chamber is made of a horizontal quartz tube with stainless steel flanges. The furnace uses tubular infrared halogen lamps and provides fast ramp rates and allows in-situ annealing processes. The horizontal motion door with the quartz tray provides easy loading and unloading of the substrate as well as of thermocouple installation.
The MC050 can receive different type of liquid delivery and vaporization apparatus. The system is provided with liquid distribution equipment that is designed according to the liquid precursors to be used and their chemical specifications.
Applications:
- Simple and multi-metallic oxides
- Metals, nitrides and alloys
- III-V, wide band gap semiconductors
Company Details
Business Type
Manufacturer, Supplier
Establishment
2004
Working Days
Monday To Sunday
Seller Details
ANNEALSYS
Sales Manager
Mr Henri De Los Rios
Address
BAT T2, PIT de la Pompignane, Rue de la Vieille Poste, Montpellier, Herault, 34055, France
Scientific Instruments in MontpellierReport incorrect details
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